The effects of high-energy electron beam irradiation on the properties of IGZO thin films prepared by rf magnetron sputtering
نویسندگان
چکیده
S. H. Jung, H. J. Moon, M. K. Ryu, K. I. Cho, B. S. Bae and E.-J. Yun* College of New IT Engineering, Hoseo University, Asan, Chungnam 336-795, Korea Department of Semiconductor and Display Engineering, Hoseo University, Asan, Chungnam 336-795, Korea Laboratory Oxide Electronics Research Team, ETRI, Daejeon 305-350, Korea Department of Semiconductor and Display Engineering and College of New IT Engineering, Hoseo University, Asan, Chungnam 336-795, Korea Department of Semiconductor and Display Engineering and Department of System Control Engineering, Hoseo University, Asan, Chungnam 336-795, Korea
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